Micropatterning of Silicon Surface by Direct Laser Interference Lithography
نویسندگان
چکیده
منابع مشابه
Fabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, Metal-assisted chemical etching (MaCE) was carried out with silver catalyst. Provided solution (or materiel) in combination with laser interference lithogr...
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ژورنال
عنوان ژورنال: Acta Physica Polonica A
سال: 2012
ISSN: 0587-4246,1898-794X
DOI: 10.12693/aphyspola.121.543